| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356198 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Epitaxial films of Nb-doped SrTiO3 were grown on (0 0 1)-oriented SrTiO3 single crystal substrates. ⺠Films were deposited in vacuum (5 Ã 10â3 mTorr) or under oxygen flow (60 mTorr). ⺠Highly strained coherent films were obtained up to a film thickness of 200 nm. ⺠Films deposited in oxygen had higher concentration of point defects than films grown in vacuum. ⺠Strain relaxation in thick films (>200 nm) occurred by redistribution of point defects and 3D growth.
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Authors
M. Markovich, J. Roqueta, J. Santiso, E. Lakin, E. Zolotoyabko, A. Rothschild,