| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356277 | Applied Surface Science | 2015 | 15 Pages |
Abstract
- Statistical analysis for synthesis of nano-pillar in crystalline Si substrates is presented.
- Model is in good agreement with experimental for the etching rate and lateral etching respectively.
- Optimum values for all parameters in fabrication of nanostructured Si are attained.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Ayu Wazira Azhari, Kamaruzzaman Sopian, Mohd Khairunaz Mat Desa, Saleem H. Zaidi,