| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356417 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠We studied influence of SiO2 buffer layer on property of AZO films on soda lime glasses by sputtering. ⺠Electrical property of film deposited at high temperature is enhanced by introducing SiO2 layers. ⺠Optical absorption edge is blue shifted due to increase of carrier concentration. ⺠SiO2 layer prepared at 400 °C is more effective compared with that at room temperature. ⺠Stress dependence of band gap is linear for AZO films on quartz but deviates for soda lime glasses.
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Authors
K.H. Ri, Y.B. Wang, W.L. Zhou, J.X. Gao, X.J. Wang, J. Yu,