| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356440 | Applied Surface Science | 2011 | 6 Pages |
Abstract
⺠We compare the microstructure of the copper and silicon doping CrN films under the same deposition conditions, and thus we can get a better understanding of nanocomposite films. ⺠The different variation in the preferred orientation with substrate bias of CrN, CrCuN and CrSiN films is considered in the manuscript. ⺠The TEM observation combined with the XPS results shows that the CrSiN film is composed of nanocrystallites distributed in amorphous Si3N4, while no amorphous phase exists in CrCuN films.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Shuyong Tan, Xuhai Zhang, Xiangjun Wu, Feng Fang, Jianqing Jiang,