| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356453 | Applied Surface Science | 2011 | 4 Pages |
Abstract
⺠A new shielded arc ion plating method with double layers and vicarious circular holes, were developed, we called DL-SAIP. ⺠When the distance between the double-layered shield plates is 10 mm, the film surface is smooth and homogeneous, and almost no particles are seen. ⺠Because of their low droplet particles number and uniform deposition rate, the TiN films prepared by this technique can be expected to perform well in applications.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Yanhui Zhao, Guoqiang Lin, Jinquan Xiao, Wenchang Lang, Chuang Dong, Jun Gong, Chao Sun,