Article ID Journal Published Year Pages File Type
5356471 Applied Surface Science 2011 4 Pages PDF
Abstract
► Si3N4 does not react with C2H2 in the sputtering condition. ► Transitional metal carbide (HfC) could force as-deposited amorphous materials (Si3N4) to crystallize as nitride due to “template effect” in multilayer growth. ► The carbide-based HfC/Si3N4 nanomultilayer can also exhibit coherent growth and get superhardness effect.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Crystallization of amorphous Si3N4 and superhardness effect in HfC/Si3N4 nanomultilayers
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