Article ID Journal Published Year Pages File Type
5356478 Applied Surface Science 2011 7 Pages PDF
Abstract
► Highly smooth zinc oxide thin films were demonstrated. ► Chemical mechanical polishing process for zinc oxide was developed. ► Chemical and mechanical aspect of CMP process synergistically work to demonstrate high removal rates with high surface finish. ► Modified Preston's equation was proposed.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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