Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5356709 | Applied Surface Science | 2012 | 7 Pages |
Abstract
⺠Atomic layer deposition of erbium oxide from (CpMe)3Er and ozone. ⺠Stoichiometric erbium oxide atomic layer deposition. ⺠Carbon-free atomic layer deposited erbium oxide. ⺠Interfacial erbium silicate formation at 800 °C or higher temperatures. ⺠Hysteresis of 50 mV and leakage current density of 10â7 A cmâ2 at 1 MV cmâ1.
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Authors
Runshen Xu, Qian Tao, Yi Yang, Christos G. Takoudis,