| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356723 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠Al-doped ZnO films were grown on quartz substrates by MOCVD. ⺠The preferred orientation of ZnO films decreased with the increase of Al content. ⺠Decomposition products of TMA bringing down the surface activity of ZnO grains. ⺠UV emission peak initially red-shifted and then blue-shifted as increasing Al content. ⺠Low electrical resistivity of Al-doped ZnO films was obtained.
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Authors
Jianfeng Su, Chunjuan Tang, Qiang Niu, Chunhe Zang, Yongsheng Zhang, Zhuxi Fu,