Article ID Journal Published Year Pages File Type
5356728 Applied Surface Science 2012 4 Pages PDF
Abstract
► We investigated reaction of water plasma with nanocrystalline TiO2 films. ► Simultaneous oxidation and hydrogenation of Ti was observed during plasma treatment. ► Water plasma treatment forms hydrogenated nanocrystalline TiO2 in the shallow surface.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Preparation of hydrogenated-TiO2/Ti double layered thin films by water vapor plasma treatment
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