Article ID Journal Published Year Pages File Type
5356733 Applied Surface Science 2012 7 Pages PDF
Abstract
► Wafer scale Si nanowire arrays can be fabricated through a simple route. ► The sizes of Si nanowires can be well controlled. ► Micro/nano hybrid structure can be obtained using same process.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Wafer-scale fabrication of silicon nanowire arrays with controllable dimensions
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