| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356737 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠The microstructure of the film changes from nanorods form to continuous dense form as oxygen flow rate increases. ⺠With increase of oxygen discharge, the position of DLE in PL spectra demonstrates a significant shift, with transformation from VO to VZn. ⺠Qualitative percentage of surface VO from XPS data demonstrates an evident decrease trend from 43.7% (180 sccm) to 34.4% (250 sccm). ⺠The results indicate that higher O2-flow rate is able to promote OZn bond formation and reduce the number of VO.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Zhifeng Shi, Shikai Zhang, Bin Wu, Xupu Cai, Jinxiang Zhang, Wei Yin, Hui Wang, Jin Wang, Xiaochuan Xia, Xin Dong, Baolin Zhang, Guotong Du,