| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356740 | Applied Surface Science | 2012 | 7 Pages |
Abstract
⺠A diamond tip is employed for AFM based surface nanomachining on silicon. ⺠Nanochannels are produced at different user-control parameter settings. ⺠Scratching number up to 5 is conducted to investigate the correlation. ⺠The dimensions of nanochannels are analyzed using linear and logarithmic fits. ⺠Current results can be used for reliable predicting the fabrication of nanochannels.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Zhuxin Dong, Uchechukwu C. Wejinya,