Article ID Journal Published Year Pages File Type
5356751 Applied Surface Science 2012 5 Pages PDF
Abstract
► Anatase TiO2 films were successfully obtained on unheated glass substrates. ► Crystallization of TiO2 thin films using Ta underlayers. ► Ti seed layer effect on the Ta underlayer crystallization. ► Anatase TiO2 films were also obtained on Ta/Ti underlayers without annealing.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
The Influence of Ta underlayers on the structure of TiO2 thin films deposited on an unheated glass substrate
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