| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356756 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Hydrogen and molybdenum co-doped ZnO TCO films were deposited. ⺠The HMZO films with low resistivity and high transmittance from 400 to 1100 nm. ⺠Crater-like surface morphology was obtained after etching by diluted HCl. ⺠The etched HMZO film with root-mean-square roughness of 46.5 nm.
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Authors
Yanfeng Wang, Qian Huang, Changchun Wei, Dekun Zhang, Ying Zhao, Xiaodan Zhang,