Double layer structure of ZnO thin films deposited by RF-magnetron sputtering on glass substrate

Article ID	Journal	Published Year	Pages	File Type
5356760	Applied Surface Science	2012	6 Pages	PDF

Abstract

âº ZnO films were deposited on glass by rf-sputtering under varying growth conditions. âº Structural, optical and electrical characterizations of the films were performed. âº We observed a tendency of ZnO thin films to form a double-layer structure. âº Heating the substrate makes the layer formed in the initial growth stages thinner.

Keywords

XRR Interface ZnO thin films Magnetron sputtering

Related Topics

Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry

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Double layer structure of ZnO thin films deposited by RF-magnetron sputtering on glass substrate

Authors

C. Besleaga, G.E. Stan, A.C. Galca, L. Ion, S. Antohe,