| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356784 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠Nano-mechanical properties on annealed ultra-thin HfO2 film are studied. ⺠By AFM analysis, hardness of the crystallized HfO2 film significantly increases. ⺠By nano-indention, the film hardness increases with less contact stiffness. ⺠Quality assessment on the annealed ultra-thin films can thus be achieved.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Wei-En Fu, Chia-Wei Chang, Yong-Qing Chang, Chih-Kai Yao, Jiunn-Der Liao,