| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356789 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠Natively textured surface hydrogenated gallium-doped zinc oxide (HGZO) thin films have been deposited via magnetron sputtering on glass substrates. ⺠The directly deposited HGZO thin films present rough crater-type surface morphology. ⺠Typical HGZO thin film exhibits a high electron mobility of 41.3 cm2/V s and a relative low sheet resistance of â¼7.0 Ω. ⺠These HGZO thin films have high optical transmittances in the visible and near infrared region (â¼380-1100 nm). ⺠A gradient H2 growth method for fabricating HGZO thin films has been proposed in magnetron sputtering process.
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Authors
Fei Wang, Xin-liang Chen, Xin-hua Geng, De-kun Zhang, Chang-chun Wei, Qian Huang, Xiao-dan Zhang, Ying Zhao,