| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356880 | Applied Surface Science | 2011 | 6 Pages |
Abstract
ⶠCrNx films with excellent mechanical and tribological properties were deposited using medium frequency magnetron sputtering with different N2 contents. ⶠThe phases in the as-deposited CrNx films change from Cr(N) + Cr2N to single-phase Cr2N, and then Cr2N + CrN to single-phase CrN as a function of N2 content. ⶠThe surface morphologies strongly depend on the N2 content and the as-deposited CrNx films exhibit typical columnar structure. ⶠCr2N films show higher hardness than CrN films, whereas CrN films exhibit lower friction coefficient.
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Authors
Qinghua Kong, Li Ji, Hongxuan Li, Xiaohong Liu, Yongjun Wang, Jianmin Chen, Huidi Zhou,