Transmission electron microscopy on early-stage tin oxide film morphology grown by atmospheric pressure chemical vapor deposition

- TEM study employing electron-transparent membranes provides direct insight in film nucleation.
- Reactivity of the tin precursor influences the rate of deposition and resulting morphology.
- Methanol used during CVD-processes acts as a surfactant.
- Changes in morphology for samples with methanol are due to lowered surface energies.
- Films made with additional methanol are smoother and have higher nucleation density.