| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357084 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠It showed that the films exhibited NaCl-type fcc structure. With the increase substrate bias the microstructure of the films changed from random orientation to (1 0 0) and (2 2 0) texture. ⺠The Ti/(Ti + Al) atomic ratio gradually increased from 43% to 52% with an increase of bias voltage. ⺠The nanohardness, friction coefficient and Lc approach highest values of 39 GPa, 0.36 and 75 N respectively. ⺠It was found that ideal mechanical properties of films can be obtained with medium substrate bias voltage.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
G.P. Zhang, G.J. Gao, X.Q. Wang, G.H. Lv, L. Zhou, H. Chen, H. Pang, S.Z. Yang,