| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357139 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠We demonstrated ultrashort pulse laser parallel processing of ITO thin film using up to 25 diffractive beams. ⺠The diffractive multiple beams generated by a spatial light modulator had high uniformity (the energy variation <9%) by avoiding symmetrical geometry design. ⺠By synchronizing a scanning galvanometer, the processing demonstrated high flexibility to generate various surface patterns.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Zheng Kuang, Walter Perrie, Dun Liu, Paul Fitzsimons, Stuart P. Edwardson, Eamonn Fearon, Geoff Dearden, Ken G. Watkins,