| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357156 | Applied Surface Science | 2012 | 9 Pages |
Abstract
⺠Ripple topography measured on gold and silver films sputtered with Ar+ 650 eV is compared to theory. ⺠Ripples were always oriented parallel to the ion beam direction. ⺠Ripples wavelength decreased with increasing energy and ion flux. ⺠Three regimes for roughness evolution have been observed as function of the angle of incidence. ⺠The lower roughness observed around 45° on gold and 60° on silver films is promising for polishing applications.
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Authors
Patrick Gailly, Claire Petermann, Pierre Tihon, Karl Fleury-Frenette,