Article ID Journal Published Year Pages File Type
5357160 Applied Surface Science 2012 4 Pages PDF
Abstract
► We developed a new method of growing graphene-like thin films on glass substrates. ► Dual-frequency capacitively coupled plasma (DF-CCP) enhanced chemical vapor deposition (CVD) was used as the film growing method. ► Graphene-like films were grown at low temperature without using any metallic catalyst. ► The defects of films could be decreased and the crystal structure could be improved effectively by annealing treatment.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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