| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357161 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠We study films surface etch rate with gas mixing ratio variation by error bars. ⺠We study films surface etch reaction and compositions with gas mixing ratio by XPS. ⺠We study films surface morphology and dielectric property with gas mixing ratio. ⺠The results are important and instructive for further etching.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
L.P. Dai, G.J. Zhang, S.Y. Wang, Z.Q. Zhong, G. Wang,