| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357313 | Applied Surface Science | 2010 | 4 Pages |
Abstract
Titanium oxynitride (TiNxOy) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density was the varied parameter. Experimental results show that the deposited TiNxOy films with a thickness of about 55Â nm have similar contents of TiN, TiNxOy and TiO2 bonds, although they are deposited at different power densities. The TiNxOy films deposited at a lower power density have fewer internal defects and grain boundaries and possess higher activation energy and a lower rate of water vapor and oxygen transmission through TiNxOy/PET films.
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Authors
M.C. Lin, M.-J. Chen, L.-S. Chang,