| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357397 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠DLC/a-Si films were prepared by pulsed filtered cathodic arc. ⺠Carbon atoms impinging on a-Si layer act not only as a carbon source for DLC formation, but also as a source for SiC formation which may potentially increase adhesive strength, hardness and wear resistance over the films. ⺠The formation of SiC was confirmed using Raman spectroscopy, transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS).
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Authors
C. Srisang, P. Asanithi, K. Siangchaew, A. Pokaipisit, P. Limsuwan,