Article ID Journal Published Year Pages File Type
5357403 Applied Surface Science 2012 5 Pages PDF
Abstract
► Porous silicon membrane was fabricated entirely by electrochemical. ► The thickness of grooves and porosity become more when applied current density. ► The roughness is extremely low after dissolution of silicon. ► Double porous silicon layer is realized with different porosity on both sides.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Nanoporous silicon membrane for fuel cells realized by electrochemical etching
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