Article ID Journal Published Year Pages File Type
5357408 Applied Surface Science 2012 6 Pages PDF
Abstract
► We prepare multilayer films of Ag/Si and Ag/SiNx by magnetron sputtering technique. ► We study the atomic oxygen (AO) resistance of Ag/Si film and Ag/SiNx. ► Nanoscaled Si or SiNx protective layer can provide better protection to Ag films against oxidation caused by AO irradiation. ► Ag/Si and Ag/SiNx films show the better lubricating performance before and after AO irradiation than pure Ag film.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film
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