| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357409 | Applied Surface Science | 2012 | 9 Pages |
Abstract
⺠Synthesis of Si nanowire arrays by catalysis etching in a new chemical solution Ag2O-HF-H2O. ⺠Spectroscopic-ellipsometry study of catalytic-etched Si nanowire surface. ⺠Demonstration of the effectiveness of SPM cleaning for Si nanowire synthesis.
Related Topics
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Authors
Yuki Kato, Sadao Adachi,