| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357443 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠The penetration depth and substrate surface damage increase with increasing cluster size. ⺠The self-diffusion coefficient and the penetration depth of a cluster significantly increase with temperature. ⺠The number of volcano-like defects and the penetration depth increase with incident energy. ⺠High sputtering yield can be obtained by increasing the incident energy at high temperature.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Shiang-Jiun Lin, Cheng-Da Wu, Te-Hua Fang, Guan-Hung Chen,