Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5357521 | Applied Surface Science | 2015 | 20 Pages |
Abstract
Tungsten oxide films deposited at different negative bias voltages by reactive magnetron sputtering transfer from amorphous to crystalline (monoclinic + hexagonal) after annealing at 500 °C in air atmosphere. Furthermore, the crystallized tungsten oxide films show different preferred orientation.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Meihan Wang, Hao Lei, Jiaxing Wen, Haibo Long, Yutaka Sawada, Yoichi Hoshi, Takayuki Uchida, Zhaoxia Hou,