Article ID Journal Published Year Pages File Type
5357521 Applied Surface Science 2015 20 Pages PDF
Abstract
Tungsten oxide films deposited at different negative bias voltages by reactive magnetron sputtering transfer from amorphous to crystalline (monoclinic + hexagonal) after annealing at 500 °C in air atmosphere. Furthermore, the crystallized tungsten oxide films show different preferred orientation.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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