Article ID Journal Published Year Pages File Type
5357621 Applied Surface Science 2015 7 Pages PDF
Abstract

- Depth profiling of TiN coated on Si substrate using laser ablation-ICP-MS.
- Characterization of particles and craters for structure and thermal property.
- TiN with a columnar structure showed clear craters with less thermal degradation.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Laser ablation of titanium nitride coated on silicon wafer substrate for depth profiling using ICP-MS
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