Article ID Journal Published Year Pages File Type
5357700 Applied Surface Science 2012 10 Pages PDF
Abstract
► Surface functionalization of CNT surfaces influences the growth of Pt by ALD inside aligned CNT arrays. ► Pt density and uniformity inside arrays depends strongly on the gasses used for functionalization. ► Ar plasma blocks nucleation, O2 plasma and trimethylaluminum treatments enhance uniformity. ► Generation/reduction of oxygen rich defect sites is the key to promote/block Pt ALD nucleation.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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