Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5357700 | Applied Surface Science | 2012 | 10 Pages |
Abstract
⺠Surface functionalization of CNT surfaces influences the growth of Pt by ALD inside aligned CNT arrays. ⺠Pt density and uniformity inside arrays depends strongly on the gasses used for functionalization. ⺠Ar plasma blocks nucleation, O2 plasma and trimethylaluminum treatments enhance uniformity. ⺠Generation/reduction of oxygen rich defect sites is the key to promote/block Pt ALD nucleation.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Arrelaine A. Dameron, Svitlana Pylypenko, Justin B. Bult, K.C. Neyerlin, Chaiwat Engtrakul, Christopher Bochert, G. Jeremy Leong, Sarah L. Frisco, Lin Simpson, Huyen N. Dinh, Bryan Pivovar,