| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357701 | Applied Surface Science | 2012 | 8 Pages |
Abstract
⺠We investigated the effect of sputtering power on structure and properties of RF sputtered CIGS films. ⺠At high sputtering power, CIGS films exhibit Cu-poor composition feature and partly amorphous phase structure. ⺠The 50 W and 100 W as-deposited films exhibit metal and semiconductor character, respectively. ⺠Annealed films exhibit improved crystalline quality and almost the same composition as the as-deposited ones.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Zhou Yu, Chuanpeng Yan, Tao Huang, Wen Huang, Yong Yan, Yanxia Zhang, Lian Liu, Yong Zhang, Yong Zhao,