| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5357705 | Applied Surface Science | 2012 | 9 Pages |
Abstract
⺠Preparation of ZrO2 thin films via sol-gel route by spin-coating method. ⺠Film thickness and refractive index varied as a function of molar ratio of EtOH during sol preparation and annealing temperature applied. ⺠Tetragonal ZrO2 formed after annealing at 400 °C. ⺠Crystallinity of ZrO2 was enhanced by increasing molar ratio of EtOH. ⺠A hot-water treatment reduced film thickness and improved crystallinity of sol-gel derived oxide.
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Authors
Mun Teng Soo, Niki Prastomo, Atsunori Matsuda, Go Kawamura, Hiroyuki Muto, Ahmad Fauzi Mohd Noor, Zainovia Lockman, Kuan Yew Cheong,