Article ID Journal Published Year Pages File Type
5358032 Applied Surface Science 2011 8 Pages PDF
Abstract
► We studied the effect of ZnO under layers on crystal structure of TiN thin films. ► Double-layered coatings consisting of ZnO/TiN were deposited by magnetron sputtering. ► The ZnO/TiN coatings exhibited TiN{1 0 0} preferred orientation. ► This TiN crystal growth should be caused by ZnO{0 0 1} crystal lattice planes.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Crystal orientation control of polycrystalline TiN thin films using ZnO under layers deposited by magnetron sputtering
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