| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5358033 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠Sputtered ZnO films are mainly formed by a chemical reaction of Zn with oxygen. ⺠ZnO changed O-rich to Zn-rich with decreasing rf-power and oxygen partial pressure. ⺠Broad PL emission was observed when the ZnO changed from O-rich to Zn-rich. ⺠Origin of broad PL emission thought to be an increase of oxygen vacancies. ⺠Chemical stoichiometry will help us to understand formation of intrinsic defects in ZnO.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Yudai Kamada, Mamoru Furuta, Takahiro Hiramatsu, Toshiyuki Kawaharamura, Dapeng Wang, Shin-ichi Shimakawa, Chaoyang Li, Shizuo Fujita, Takashi Hirao,