| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5358056 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠Pulsed dc magnetron sputtering (PDMS) with a cylindrical rotating target was employed for GZO TCO film. ⺠It exhibits proper electrical and optical properties for front electrodes of TFSC. ⺠The 750 nm-thick GZO film shows the best electrical and optical properties. ⺠Texturing of the film yields an improved light trapping without degradation in electrical properties. ⺠GZO film prepared by PDMS with rotating cylindrical target can be applied to front electrodes of TFSCs.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Beom-Ki Shin, Tae-Il Lee, Ji-Hyeon Park, Kang-Il Park, Kyung-Jun Ahn, Sung-Kee Park, Woong Lee, Jae-Min Myoung,