| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5358058 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠We explored new dielectric compositions and thin films using continuous composition spread. ⺠MgO and Ta2O5 compound films were deposited on a substrate and high throughput evaluated. ⺠We found some specific compositions which had high dielectric constant and very low dielectric loss. ⺠These optimized thin film compositions were processed at low temperature (below 350 °C).
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Yun Hoe Kim, Jong-Han Song, Jin Sang Kim, Seok-Jin Yoon, Kyung Bong Park, Ji-Won Choi,