Article ID Journal Published Year Pages File Type
5358303 Applied Surface Science 2015 11 Pages PDF
Abstract

- Two different a-C:H coatings in various thicknesses on Si (1 0 0) have been studied.
- For both types no significant difference in surface morphology is detectable.
- The grain number with respect to their height appears randomly distributed.
- In average no grain higher than 14 nm and larger than 0.05 μm2 was observed.
- A height to area correlation confines all detected grains to a limited region.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
, , , , , ,