Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5358303 | Applied Surface Science | 2015 | 11 Pages |
Abstract
- Two different a-C:H coatings in various thicknesses on Si (1Â 0Â 0) have been studied.
- For both types no significant difference in surface morphology is detectable.
- The grain number with respect to their height appears randomly distributed.
- In average no grain higher than 14 nm and larger than 0.05 μm2 was observed.
- A height to area correlation confines all detected grains to a limited region.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Alberto Catena, Thomas McJunkin, Simonpietro Agnello, Franco M. Gelardi, Stefan Wehner, Christian B. Fischer,