Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5358348 | Applied Surface Science | 2014 | 6 Pages |
Abstract
Fullerene-like carbon nitride films exhibit high elastic modulus and low friction coefficient. In this study, thin CNx films were deposited on silicon substrate by DC magnetron sputtering and the tribological behavior at nanoscale was evaluated using an atomic force microscope. Results show that CNx films with fullerene-like structure have a friction coefficient (CoF â¼Â 0.009-0.022) that is lower than amorphous CNx films (CoF â¼Â 0.028-0.032). Analysis of specimens characterized by X-ray photoelectron spectroscopy shows that films with fullerene-like structure have a higher number of sp3 CN bonds and exhibit the best mechanical properties with high values of elastic modulus (E > 180 GPa) and hardness (H > 20 GPa). The elastic recovery determined on specimens with a fullerene-like CNx structure was of 95% while specimens of amorphous CNx structure had only 75% elastic recovery.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Francisco Javier Flores-Ruiz, Christian Ivan Enriquez-Flores, Fernando Chiñas-Castillo, Francisco Javier Espinoza-Beltrán,