Angular distribution of species in pulsed laser deposition of LaxCa1−xMnO3

The angular distribution of species from a La0.4Ca0.6MnO3 target irradiated with a 248 nm nanosecond pulsed laser was investigated by Rutherford backscattering spectrometry for four different Ar pressures. The film thickness angular distribution was also analyzed using profilometry. Depending on the background gas pressure, the target to substrate distance, and the angular location the film thickness and composition varies considerably. In particular the film composition could vary by up to 17% with respect to the composition of the target material.