| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5358563 | Applied Surface Science | 2015 | 5 Pages |
Abstract
Experimental investigations of laser-annealed SiOx films allowed determining their transformation with the formation of nanoislands. It was concluded that the surface topology, dielectric matrix structure, and electrical conductivity depend on laser beam intensity during the annealing process.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
O.O. Gavrylyuk, O.Yu. Semchuk, O.V. Steblova, A.A. Evtukh, L.L. Fedorenko, O.L. Bratus, S.O. Zlobin, M. Karlsteen,