Optical performance of thin films produced by the pulsed laser deposition of SiAlON and Er targets

Article ID	Journal	Published Year	Pages	File Type
5358572	Applied Surface Science	2015	14 Pages	PDF

Abstract

We report the preparation and optical performance of thin films produced by pulsed laser deposition in vacuum at room temperature, by focusing an ArF excimer laser onto two separate targets: a commercial ceramic SiAlON and a metallic Er target. As a result of the alternate deposition Er:SiAlON films were formed. The as grown films exhibited an Er-related emission peaking at 1532Â nm. The role of the PLD energy density during deposition on the final matrix film was investigated, in order to achieve an optimized matrix composition with enhanced optical properties, and its effect on the light emission performance.

Keywords

SiAlON Erbium Silicon oxynitride Refractive index Photoluminescence Pulsed laser deposition

Related Topics

Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry

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Optical performance of thin films produced by the pulsed laser deposition of SiAlON and Er targets

Authors

I. Camps, J.M. RamÃrez, A. Mariscal, R. Serna, B. Garrido, M. Perálvarez, J. Carreras, N.P. Barradas, L.C. Alves, E. Alves,