| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5358865 | Applied Surface Science | 2011 | 5 Pages |
Abstract
ⶠThe TiVCr coatings have a composite structure with amorphous and bcc crystal phases. ⶠThe driving force for the crystallization is the intrinsic stress in films. ⶠHigher sputtering pressure leads to increase in void density and decrease in hardness.
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Authors
Du-Cheng Tsai, Yen-Lin Huang, Sheng-Ru Lin, De-Ru Jung, Fuh-Sheng Shieu,