Article ID Journal Published Year Pages File Type
5358869 Applied Surface Science 2011 6 Pages PDF
Abstract
▶ In this paper we report detail investigation and correlation between micro-structural and optical properties of nano-crystalline silicon (nc-Si) deposited by plasma enhancement chemical vapor deposition (PECVD) on porous aluminum structure. ▶ The effect of anodisation currents on the microstructure of aluminium surface layer and nc-Si films was systematically studied by Atomic Force Microscopy (AFM) and Tranmission Electron microscopy (TEM), Raman spectroscopy and X-ray diffraction (XRD). ▶ The optical constants (n and k as a function of wavelength) of the films were obtained using variable angle spectroscopic ellipsometry (SE) in the UV-vis-NIR regions.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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