Article ID Journal Published Year Pages File Type
5358871 Applied Surface Science 2011 4 Pages PDF
Abstract
▶ The optical band gap of the films monotonically decreases with the increase of C2H2 flow rate. ▶ There is not Si-C bond in the surface of the SiCN film. ▶ The bonding structures in the surface of the SiCN film are different from those in the SiCN film. ▶ The SiCN films deposited by reactive magnetron sputtering have an even surface.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering
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