| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5358877 | Applied Surface Science | 2011 | 7 Pages |
Abstract
ⶠTaC coating are deposited at 800 °C and 1200 °C with different TaCl5 pressure by chemical vapor deposition. ⶠSuper-saturation is responsible for different coating morphology and texture structure. ⶠThe growth mechanism of the texture coating is explained by the competitive growth model. ⶠA diffusion model of deposition species around step-edge-corner was proposed.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Zhao-Ke Chen, Xiang Xiong, Ying Long,