Article ID Journal Published Year Pages File Type
5358895 Applied Surface Science 2011 6 Pages PDF
Abstract
▶ The successful growth of AlxGa1−xN thin films on Si (1 1 1) substrate with various Al mole fractions has been obtained. ▶ Structural and morphology studies indicate that relatively larger tensile strain exits in the sample with the smallest Al mole fraction. ▶ A smaller compressive strain and larger grain size appears with Al mole fraction = 0.3. ▶ Strain is relaxed with the highest Al mole fraction sample. ▶ Linear relationship between the barrier height and Al mole fraction has been obtained.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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